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SNE-3000MS

Specifications
Electron System
Stage System
Image System
Vacuum System
Dimensions
Resolution
15nm (30kV, SE Image)
20nm (30kV, BSE Image)
Magnification 20x~60,000x
Accelerating Voltage 1~30kV (1/5/10/15/20/30)
Detector
Secondary Electron Image(SE)
Backscattered Electron Image(BSE)
Electron Gun Pre-centered Tungsten Filament Cartridge
Stage Traverse
3-axis System (X, Y, R, Z, T – Manual)
X, Y-axis : 35mm / R-axis : 360°
* Image Shift : ±150μm
* CCD Camera installed in the Chamber
* T-axis : 0 to 45˚ (Option)
Max. Sample Size 70mm in Diameter x 30mm in Height
Automation Function
Auto Start, Auto Focus,
Auto Stigmator, Auto Contrast & Brightness
Image Format BMP, JPEG, PNG, TIFF
Vacuum Mode High & Low Vacuum
Vacuum Pump Rotary Pump / Turbo Molecular Pump (Full Automation)
Main Unit 390(W)x380(D)x560(H)mm, 83kg
Controller Unit 390(W)x325(D)x560(H)mm, 37kg
Rotary Pump 400(W)x160(D)x340(H)mm, 24kg
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Description

About the SNE-3000MS

The standard of Table-top SEM,
SNE-3000MS

 

  Performance
15nm
Resolution
60,000x
Magnification
SE Image
SE Detector

The most appropriate Table-top SEM for the surface inspection with 10,000x of magnification which is main inspection range by SEM
Entry-level Table-top SEM with 15nm resolution & 60,000x magnification


SE (Secondary Electron)

▷ Create images with the height level information. Mostly used for surface inspection

 

  Convenience
Stage System
X,Y,R (3-axis)
Beam Shift: 150μm
Auto Setting
Focus, Contrast, Brightness
Simple S/W
Convenient Operation

Convenient stage movement by 3-axis and able to operate easily and conveniently with mouse control in U.I
Able to get various analysis results with various scan modes measurement tool

 

convenience4

    SNE-3000MS Quick contact

      Red star = required