X-eye NF120
- Category: X-Ray Inspection Equipment
- Manufacturer: SEC
- Non-destructive analysis system for Wafer Level Packaging
- High-resolution image with Dual Type CTs
- TSV, Micro Bump, Pattern
Nano-focus X-ray Inspection System
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About the X-eye NF120
Specifications
X-ray Tube | 120 kV / 200 µA |
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Min. Resolution | 0.2㎛ |
Table Size | 12inch wafer |
Detector | 6 inch FPXD |
CT Scan Method | Oblique CT / Cone beam CT |
Foot print | 2,380 x 1,450 x 2,120 mm Control Box : 600 x 1,250 x 1,030 mm |
Weight | 7,000kg |
AXIS | X, Y, Z, Tilt (70º), R |
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Wafer Bump Void
Wafer TSV Void