Large Area Ultrasonic Coating System – FlexiCoat MAX
- Category: Photoresist & Polyimide Films Coating Systems for Photolithography
- Manufacturer: Sonotek
Large area, fully automated, programmable standalone system with coordinated XYZ motion control using Windows-based software and user-friendly teach pendant with trackball. Versatile mid to high-volume or pilot scale production thin film coatings.
About the Large Area Ultrasonic Coating System – FlexiCoat MAX
Basic Specifications
| Dimensions: Varies |
| Work Area*: |
| Control: Windows-based (PC included) |
| Power Requirements: 120V, 220V +/- 10%, 50-60 Hz |
| Air: 551.6 kPa (80 PSI) dry unlubricated air |
| Motors: Servo |
| Certification: CE |
| Ultrasonic Nozzle Designs: AccuMist, Impact, Vortex, MicroMist, or Propel |
Options:
| Heat and/or Vacuum Plate: 150C |
| Head configuration: up to 3 heads (Ultrasonic or Vector) |
| Common Options: wire/rod coater, Nozzle rotate and/or tilt, 1 or 2 drawer load system, LEL Sensors, cleanroom upgrade, aggressive material upgrade, Auto substrate flipping, IR heat |
| Liquid Delivery: Common Liquid Delivery: Syringe pump (standard, Sonic or stirring), gantry mounted syringe pump, MicroFlow, SonoFlow Fusion, HyperFlow catalyst pump, gear pump |
| *Additional custom options may be available depending upon application requirements |