Automated Plasma Machine STA-10iL
- Category: Plasma Treatment Systems
- Manufacturer: Surfx
A Turnkey Automated Plasma Machine
Designed specifically for precision plasma cleaning of semiconductors and electronics with zero damage, high reliability and single-part traceability.
- In-line atmospheric pressure plasma system for high volume manufacturing
- Versatile conveyor design allows for rapid surface preparation of electronics, including all types of IC packages
- Argon plasma with variable chemistry, O2, N2, H2, at low temperature, 60 to 120 °C
- Downstream, electrically neutral plasma which is free of sparks, streamers, ESD, UV and particles
- Equipped with CCD vision tracking and XYZ fiducial calibration
- Real-time monitoring of process variables: power, gas flow rates and temperature
About the Automated Plasma Machine STA-10iL
Automated Plasma Machine to Clean dies for the packaging industry. Also used throughout semiconductor, electronics, Aero, Defense, laboratory, and university research.
FLEXIBILITY
Our most versatile platform can be configured with drawer, conveyor, or rotary table. Whether you're cleaning dies, silicon wafers, medical devices or molded plastic parts, the STA-10 can be easily configured for any job. Working volume is 350 x 475 x 100 mm.
ELIMINATE EXCUSES
With a slim footprint, fast lead times, and flexible configurations there is no excuse to skip plasma surface preparation for critical processes. Save money and improve quality with turnkey systems configured for your application.
The STA-10iL automated plasma machine is designed to clean and activate substrates for improved adhesion. It is ideal for semiconductor packaging and electronics manufacturing. The system comes standard with in-line conveyance for high-volume manufacturing. An optional drawer can be installed for high-mix, low-volume production.
Inside the STA-10iL automated plasma machine, a three-axis gantry selectively applies the most advanced atmospheric plasma to your substrates. Surfx’s Atomflo™ controller operates with low voltage, radio frequency (RF) power, and generates a uniform, particle free, and electrically neutral plasma that is safe on the most sensitive electronics.
The conveyor design allows for rapid surface preparation of electronics, including all types of IC packages. Whether for cleaning dies, silicon wafers, medical devices or molded plastic parts, the STA-10iL easily can be configured for any job with a working volume of 550 x 760 x 60 mm.
This automated plasma machine has many options for in-line or batch manufacturing with full traceability:
- Oxygen plasma for organic clean
- Hydrogen plasma for metal oxide removal
- Cleanroom class 100 (1,000 is standard)
- Inert gas purge for reducing gas chemistry
- Substrate Heating and cooling